Research

YBCO Microbolometers

Smart Skin

Device-Level Vacuum Packaging

Si_xGe_1-x and Si_xGe_1-xO_y Microbolometers

        Si_xGe_1-x and Si_xGe_1-xO_y Thin Films

        Si_xGe_1-x Bolometers

        Forming Gas Annealing of Si_xGe_1-x and Si_xGe_1-xO_y Bolometers

Infrared MEMS Spectrometer

Infrared Focal Plane Arrays

RF MEMS Resonators