EE5343   Silicon IC's fabrication course - The University of Texas at Arlington -  

Lecture webpage

Lecture Time: Mon Wed 7:00 p.m. - 8:20 p.m. Location: 108 NH

Syllabus, Target Schedule, Presence sheet Template

Important Announcements

We will try to grade this week

· Instructor Dr. Nikolai Stelmakh

Office            : Room 509 NH 

Office hours :  Monday and Wednesday by appointment

E-mail           :  nikolais@uta.edu

Web              : http://www-ee.uta.edu/eedept/faculty/stelmakh.htm

GTAs: Deep Karan

Office            : NanoFab building 2nd floor

Office hours : Monday: 10:00 AM to 1:00 PM

                       Tuesday: 2:00 PM to 5:00 PM

E-mail           : karandeep1980@gmail.com

Required Text: Silicon Processing for the VLSI Era Volume 1- Process Technology Second Edition

By: S. Wolf and R. N. Tauber

Recommended reading: Introduction to Solid State Physics by Ch. Kittel, any edition

Class Materials:

Lecture notes taken in class (please send me a scanned copy I will post it):

L1, L2, L3, L4, L5, L6, L7, L8, L9, L10, L11, L12, L13, L14, L15, L16, L17, L18, L19, L20, L21, L22, L23, L24, L25

Initial lecture notes (please do not print, save  forest, use as online reference to the volume of material taught in class):

L1, L2, L3, L4, L5, L6, L7, L8, L9, L10, L11, L12, L13, L14, L15, L16, L17, L18, L19, L20, L21a, L21b, L22, L23, L24, L25

Homework: HW1: Read §1.1, Solve Ch.1 Problems 1 - 6 (HW1 deadline is Wednesday 7:00 PM)

                       HW2: Read Chapter 2 and Chapter 9, Solve Ch.1 Problems 7 - 11 and Solve Ch.9 Problems 1 - 5 (HW2 new deadline is Wednesday Feb 15th 7:00 PM)

                       HW3: Read Chapter 8, Solve Ch.8 Problems 3 - 5 (HW3 deadline is Wednesday Feb 15th 7:00 PM)

                       HW4: Read Chapter 8, Solve Ch.8 Problems 8 (HW4 deadline is Wednesday Feb 22th 7:00 PM)

                       HW5: Read Chapter 10, Solve Ch.10 Problems 1-3 and 13-18 (HW5 deadline is Wednesday March 8th 7:00 PM)

                       HW6: Read Chapter 12, Solve Ch.12 Problems 1-3  (HW6a deadline is Wednesday March 22th 7:00 PM)

                                                                                        Problems 4-7  (HW6b deadline is Wednesday March 29th 7:00 PM)

                        HW7: Read Chapter 11, Solve Ch.11 Problems 1-2  (HW7 deadline is Wednesday April 5th 7:00 PM)

HW8: Read Chapter 14, Solve  Problems 1-5  (HW8 deadline is Wednesday April 19th 7:00 PM)

HW9: Solve  Problems  1-9 (HW9 deadline is Thursday May 4st  11:59 PM) last HW

HW Solutions (to appear one week after deadline): HW1Sol, HW2Sol, HW3Sol, HW4Sol, HW5Sol, HW6Sola, HW6Solb, HW7Sol, HW7Sol2, HW8Sol, HW9Sol ( I saw a couple of mistakes in the solutions please be aware and compare with the class notes, all critical problems are solved in class)

Quiz Solutions: Q1 Sol, Q2 Sol, Q3 Sol

Support Materials: Si Crystal Structure Views: {111}, {100}, {221}, {110} Tennis balls experiments: fcc, "stretched" diamond, video of billiard experiments (sputtering principle)

Greek Alphabet, Trig Identities

Mid-Term Exam: E1Sol

Final Exam: E2Sol (please look into solutions, if you see any errors, please, send me an e-mail) I will grade according to these solutions.

Grading Criteria:

Homework, Exams, Project and their criteria

Homework: 10 % Practical and lab work: 45 % Midterm: 20 % Final: 25 %