Directors: Professors Donald P. Butler and Zeynep Celik-Butler
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The microsensors research laboratory is used in the design, fabrication and characterization of microsensor materials and devices. It provides measurement capabilities from 2K to 450K. Two low-temperature Dewars, two closed-cycle Helium refrigerators, one open cycle Helium cryostat, various cryogenic inserts, microprocessor-based programmable temperature controllers, temperature sensors, and fiber optic instrumentation support the variable temperature characterization of microsensors. The optical characterization facilities include an Oriel MS257 spectrometer/monochrometer, two IR sources, calibrated pyroelectric detectors, various fiber optic components, laser diodes and Oriel 7 GHz photodiodes. The monochrometer/spectrometer and IR sources allow the characterization of devices and materials from 1 - 12 mm IR wavelength. Computer workstations are used as system controllers for data acquisition and modeling. |
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The facility consists of Neocera turn-key pulsed laser deposition system. The system consists of an 18 inch,
turbo pumped vacuum chamber. The system has a 3 inch rf sputter gun in addition to a 6-target PLD carousel.
The substrate can be heated to 950 oC. The system uses a Lambda-Physik Compex 301 KrF
excimer laser operating at 248 nm. The laser produces up to 1 Joule per pulse with a repition rate of
1 to 10 Hz. The PLD system was purchased through a grant from the National Science Foundation
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The PLD system is used primarily for the deposition of ferroelectric and pyroelectric materials used in uncooled infrared detectors. Other bolometric, superconductive, and optoelectronic materials are also investigated. |
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Looking through the view port of the vacuum chamber, one sees a view of the plasma plume created when the laser pulse strikes the target. The plume includes target material traveling through the low pressure atmosphere towards the substrate being coated by the thin film. |