microsensors research laboratory is used in the design, and characterization of
microsensor materials and devices, including but not limited to infrared
detectors, pressure and force sensors, MEMS resonators and accelerometers.
The IR radiation detector calibration set-up provides measurement
capabilities from 2K to 450K temperature and from 1 - 14
µm IR wavelength.
Several optical cryostats and optical tables with semiconductor characterization
equipment are available in the lab.
force/pressure sensor characterization system consists of a tensile mono-axial
10 gm load-cell with a resolution of ± 49 µN, and a customized probe-tip holder
to facilitate use of probe-tips with varying radius. This is attached to a
Nanopositioner with 0-50 µm Z-axis travel and a minimum resolution of 0.2 nm. A
micromanipulator stage capable of moving in X, Y and Z-directions for coarse
movement and a rotary tilt stage to tilt the sample from 0°-45°
are utilized to hold the sample.
The accelerometer characterization setup consists of a shaker with a shaker
power amplifier, a signal generator, Irvine Sensors model MS 3110 capacitive
readout circuitry, and a calibrated acceleration sensor.
MEMS resonators are assessed in a-custom made vacuum chamber using a network
analyzer, a DC power supply and vacuum pump.
Computer workstations are used as system controllers for data acquisition and
modeling. Several software packages are available including ANSYS and